Inventor
BEDNAREK TODD J
US4 patents
⚠️ This page may combine multiple inventors who share the name “BEDNAREK TODD J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
3 patentsUS6934005B2Aug 23, 2005
Reticle focus measurement method using multiple interferometric beams
ASML HOLDING NV9 citations71
US6850330B2Feb 1, 2005
Reticle focus measurement system using multiple interferometric beams
ASML HOLDING NV2 citations60
US7016051B2Mar 21, 2006
Reticle focus measurement system using multiple interferometric beams
ASML HOLDING NV0 citations49