Inventor
BEEREN RAYMOND GERARDUS MARIUS
BE7 patents
⚠️ This page may combine multiple inventors who share the name “BEEREN RAYMOND GERARDUS MARIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7900641B2Mar 8, 2011
Cleaning device and a lithographic apparatus cleaning method
ASML NETHERLANDS BV12 citations82
US7866330B2Jan 11, 2011
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
ASML NETHERLANDS BV9 citations82
US7841352B2Nov 30, 2010
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
ASML NETHERLANDS BV9 citations82
US8011377B2Sep 6, 2011
Cleaning device and a lithographic apparatus cleaning method
ASML NETHERLANDS BV1 citations50
US7969548B2Jun 28, 2011
Lithographic apparatus and lithographic apparatus cleaning method
ASML NETHERLANDS BV1 citations50
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS
2 patentsUS9013672B2Apr 21, 2015
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS0 citations48
US8947629B2Feb 3, 2015
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS0 citations38