Inventor

FISCHER JONATHAN DAVID

US2 patents

Patents

2 patents

US10974276B2Apr 13, 2021

Hydrophobic shafts for use in process chambers

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations56

US10569299B2Feb 25, 2020

Hydrophobic shafts for use in process chambers

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations56