Inventor
SEKIGUCHI SHINICHI
JP29 patents
⚠️ This page may combine multiple inventors who share the name “SEKIGUCHI SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
20 patentsUS6700273B1Mar 2, 2004
Gas transfer machine
EBARA CORP24 citations92
US6464472B1Oct 15, 2002
Circulation fan apparatus and circulation-fan driving motor
EBARA CORP25 citations92
US6539043B1Mar 25, 2003
Discharge-pumped excimer laser device
EBARA CORP18 citations84
US6326712B1Dec 4, 2001
Magnetic bearing device
EBARA CORP17 citations84
US6519273B2Feb 11, 2003
Magnetic bearing and circulation fan apparatus
EBARA CORP13 citations83
US7717684B2May 18, 2010
Turbo vacuum pump and semiconductor manufacturing apparatus having the same
EBARA CORP9 citations82
US6366039B1Apr 2, 2002
Excimer laser device
EBARA CORP12 citations74
US10978315B2Apr 13, 2021
Vacuum evacuation system
EBARA CORP5 citations72
US6455966B1Sep 24, 2002
Magnetic bearing device for motor-combined structure
EBARA CORP12 citations72
US6359767B1Mar 19, 2002
Apparatus for controlling magnetic levitation system
EBARA CORP8 citations67
US7938619B2May 10, 2011
Turbo vacuum pump
EBARA CORP2 citations63
US7645116B2Jan 12, 2010
Turbo vacuum pump
EBARA CORP3 citations63
US7645126B2Jan 12, 2010
Vacuum pump and semiconductor manufacturing apparatus
EBARA CORP5 citations63
US6603787B1Aug 5, 2003
Discharge-pumped excimer laser device
EBARA CORP5 citations63
US6809448B2Oct 26, 2004
Excimer laser apparatus
EBARA CORP6 citations61
US6785314B2Aug 31, 2004
Electric discharge gas laser
EBARA CORP2 citations59
US6404794B1Jun 11, 2002
Excimer laser apparatus
EBARA CORP4 citations59
US10040026B2Aug 7, 2018
Fan scrubber and vacuum pump apparatus
EBARA CORP1 citations51
US10641256B2May 5, 2020
Vacuum pump with abatement function
EBARA CORP0 citations41
US10641272B2May 5, 2020
Vacuum pump with abatement function
EBARA CORP0 citations41