Inventor

KAWASHIMA HIROYASU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “KAWASHIMA HIROYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

2 patents

US7717684B2May 18, 2010

Turbo vacuum pump and semiconductor manufacturing apparatus having the same

EBARA CORP9 citations82

US7360454B2Apr 22, 2008

Flowmeter having a float and a displacement sensor

EBARA CORP18 citations82

KAWASHIMA HIROYASU

1 patent

US8172515B2May 8, 2012

Turbo vacuum pump

KAWASHIMA HIROYASU9 citations77

SEKIGUCHI SHINICHI

1 patent

US8066495B2Nov 29, 2011

Turbo vacuum pump and semiconductor manufacturing apparatus having the same

SEKIGUCHI SHINICHI6 citations67