Inventor
LUO YA
US13 patents
⚠️ This page may combine multiple inventors who share the name “LUO YA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS11561477B2Jan 24, 2023
Training methods for machine learning assisted optical proximity error correction
ASML NETHERLANDS BV4 citations85
US12204250B2Jan 21, 2025
Training methods for machine learning assisted optical proximity error
ASML NETHERLANDS BV1 citations74
US11768440B2Sep 26, 2023
Training methods for machine learning assisted optical proximity error correction
ASML NETHERLANDS BV1 citations73
US10996565B2May 4, 2021
Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device
ASML NETHERLANDS BV2 citations73
US12399423B2Aug 26, 2025
Method for training machine learning model to determine optical proximity correction for mask
ASML NETHERLANDS BV2 citations71
US10948831B2Mar 16, 2021
Methods of determining process models by machine learning
ASML NETHERLANDS BV1 citations62
US12505524B2Dec 23, 2025
Method for training or using a process model for determining a pattern in a patterning process
ASML NETHERLANDS BV0 citations48