Inventor

TOUKHY MEDHAT E

US2 patents

Patents

2 patents

US7824837B2Nov 2, 2010

Positive-working photoimageable bottom antireflective coating

AZ ELECTRONIC MATERIALS USA54 citations95

US8039202B2Oct 18, 2011

Positive-working photoimageable bottom antireflective coating

AZ ELECTRONIC MATERIALS USA11 citations81