Inventor

CHEN YUAN-HSUAN

TW3 patents

⚠️ This page may combine multiple inventors who share the name “CHEN YUAN-HSUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

2 patents

US9481069B2Nov 1, 2016

Chemical mechanical polishing apparatus and polishing method using the same

TAIWAN SEMICONDUCTOR MFG CO LTD17 citations81

US11728172B2Aug 15, 2023

Wafer thinning apparatus having feedback control

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

CHEN YUAN HSUAN

1 patent

US10643853B2May 5, 2020

Wafer thinning apparatus having feedback control and method of using

CHEN YUAN HSUAN3 citations65