Inventor
PALAGASHVILI DAVID
US25 patents
⚠️ This page may combine multiple inventors who share the name “PALAGASHVILI DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS6962644B2Nov 8, 2005
Tandem etch chamber plasma processing system
APPLIED MATERIALS INC108 citations97
US6692903B2Feb 17, 2004
Substrate cleaning apparatus and method
APPLIED MATERIALS INC414 citations97
US6444040B1Sep 3, 2002
Gas distribution plate
APPLIED MATERIALS INC56 citations96
US6120608ASep 19, 2000
Workpiece support platen for semiconductor process chamber
APPLIED MATERIALS INC22 citations92
US7552736B2Jun 30, 2009
Process for wafer backside polymer removal with a ring of plasma under the wafer
APPLIED MATERIALS INC9 citations84
US7879250B2Feb 1, 2011
Method of processing a workpiece in a plasma reactor with independent wafer edge process gas injection
APPLIED MATERIALS INC7 citations83
US7832354B2Nov 16, 2010
Cathode liner with wafer edge gas injection in a plasma reactor chamber
APPLIED MATERIALS INC13 citations83
US6369493B1Apr 9, 2002
Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket
APPLIED MATERIALS INC9 citations74
US11322337B2May 3, 2022
Plasma processing system workpiece carrier with thermally isolated heater plate blocks
APPLIED MATERIALS INC1 citations62
US8383002B2Feb 26, 2013
Method of processing a workpiece in a plasma reactor with independent wafer edge process gas injection
APPLIED MATERIALS INC2 citations62
US11302520B2Apr 12, 2022
Chamber apparatus for chemical etching of dielectric materials
APPLIED MATERIALS INC1 citations61
US10083816B2Sep 25, 2018
Shielded lid heater assembly
APPLIED MATERIALS INC0 citations52
US9639097B2May 2, 2017
Component temperature control by coolant flow control and heater duty cycle control
APPLIED MATERIALS INC0 citations51
US9070536B2Jun 30, 2015
Plasma reactor electrostatic chuck with cooled process ring and heated workpiece support surface
APPLIED MATERIALS INC0 citations36
WILLWERTH MICHAEL D
4 patentsUS8270141B2Sep 18, 2012
Electrostatic chuck with reduced arcing
WILLWERTH MICHAEL D26 citations92
US8419893B2Apr 16, 2013
Shielded lid heater assembly
WILLWERTH MICHAEL D7 citations83
US8757603B2Jun 24, 2014
Low force substrate lift
WILLWERTH MICHAEL D5 citations72
US9362148B2Jun 7, 2016
Shielded lid heater assembly
WILLWERTH MICHAEL D1 citations61