Inventor
YUEN STEPHEN
US12 patents
⚠️ This page may combine multiple inventors who share the name “YUEN STEPHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6677242B1Jan 13, 2004
Integrated shallow trench isolation approach
APPLIED MATERIALS INC242 citations99
US6566270B1May 20, 2003
Integration of silicon etch and chamber cleaning processes
APPLIED MATERIALS INC31 citations92
US6322714B1Nov 27, 2001
Process for etching silicon-containing material on substrates
APPLIED MATERIALS INC50 citations92
US10083816B2Sep 25, 2018
Shielded lid heater assembly
APPLIED MATERIALS INC0 citations52
US10553398B2Feb 4, 2020
Power deposition control in inductively coupled plasma (ICP) reactors
APPLIED MATERIALS INC0 citations41