Inventor
WEI GUODAN
US14 patents
⚠️ This page may combine multiple inventors who share the name “WEI GUODAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS10431493B2Oct 1, 2019
Doping control of metal nitride films
APPLIED MATERIALS INC5 citations82
US10982326B2Apr 20, 2021
Counter-flow multi inject for atomic layer deposition chamber
APPLIED MATERIALS INC3 citations72
US10487399B2Nov 26, 2019
Atomic layer deposition chamber with counter-flow multi inject
APPLIED MATERIALS INC3 citations72
US10008412B2Jun 26, 2018
Doping control of metal nitride films
APPLIED MATERIALS INC2 citations71
US9659814B2May 23, 2017
Doping control of metal nitride films
APPLIED MATERIALS INC2 citations71
US11587829B2Feb 21, 2023
Doping control of metal nitride films
APPLIED MATERIALS INC0 citations61
US10910263B2Feb 2, 2021
Doping control of metal nitride films
APPLIED MATERIALS INC0 citations61
US9460932B2Oct 4, 2016
Surface poisoning using ALD for high selectivity deposition of high aspect ratio features
APPLIED MATERIALS INC0 citations51