Inventor

VOELK HANS-PETER

DE2 patents

Patents

2 patents

US8048208B2Nov 1, 2011

Method and apparatus for depositing chalcogens

CENTROTHERM PHOTOVOLTAICS AG0 citations30

US7850819B2Dec 14, 2010

Plasma reactor with high productivity

CENTROTHERM PHOTOVOLTAICS AG0 citations29