Inventor
WURZER MARTIN
DE11 patents
⚠️ This page may combine multiple inventors who share the name “WURZER MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
5 patentsUS9540226B2Jan 10, 2017
System and method for a MEMS transducer
INFINEON TECHNOLOGIES AG9 citations84
US9580299B2Feb 28, 2017
MEMS device and method of making a MEMS device
INFINEON TECHNOLOGIES AG6 citations83
US9591408B2Mar 7, 2017
Adjustable ventilation openings in MEMS structures
INFINEON TECHNOLOGIES AG4 citations72
US11528545B2Dec 13, 2022
Single-ended readout of a differential MEMS device
INFINEON TECHNOLOGIES AG2 citations70
US9673785B2Jun 6, 2017
Packaged MEMS device comprising adjustable ventilation opening
INFINEON TECHNOLOGIES AG1 citations51
DEHE ALFONS
4 patentsUS8983097B2Mar 17, 2015
Adjustable ventilation openings in MEMS structures
DEHE ALFONS28 citations93
US9002037B2Apr 7, 2015
MEMS structure with adjustable ventilation openings
DEHE ALFONS24 citations92
US9409763B2Aug 9, 2016
MEMS device and method of making a MEMS device
DEHE ALFONS13 citations83
US8723277B2May 13, 2014
Tunable MEMS device and method of making a tunable MEMS device
DEHE ALFONS14 citations83