Inventor
KOSHIJIMA KOSUKE
JP2 patents
Patents
2 patentsUS8790860B2Jul 29, 2014
Actinic ray-sensitive or radiation-sensitive resin composition, and resist film, pattern forming method, method for preparing electronic device, and electronic device, each using the same
KOSHIJIMA KOSUKE4 citations66
US9244344B2Jan 26, 2016
Actinic ray-sensitive or radiation-sensitive resin composition, and, resist film, pattern forming method, electronic device manufacturing method, and electronic device, each using the same
KOSHIJIMA KOSUKE0 citations45