Inventor
WEN RICHARD
US7 patents
⚠️ This page may combine multiple inventors who share the name “WEN RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJIFILM PLANAR SOLUTIONS LLC
4 patentsUS9735030B2Aug 15, 2017
Polishing compositions and methods for polishing cobalt films
FUJIFILM PLANAR SOLUTIONS LLC4 citations71
US9735031B2Aug 15, 2017
Polishing compositions and methods for polishing cobalt films
FUJIFILM PLANAR SOLUTIONS LLC4 citations71
US8771540B2Jul 8, 2014
Highly dilutable polishing concentrates and slurries
FUJIFILM PLANAR SOLUTIONS LLC0 citations49
US9190286B2Nov 17, 2015
Composition for advanced node front-and-back-end of line chemical mechanical polishing
FUJIFILM PLANAR SOLUTIONS LLC0 citations46