Inventor
SCHWEIGHOEFER MICHAEL
DE3 patents
Patents
3 patentsUS11480181B2Oct 25, 2022
Vacuum system with a multi-stage and multi-inlet vacuum pump with a directional element separating pump stages
PFEIFFER VACUUM GMBH0 citations47
US9995309B2Jun 12, 2018
Vacuum system
PFEIFFER VACUUM GMBH0 citations43
US9422937B2Aug 23, 2016
Vacuum pump
PFEIFFER VACUUM GMBH0 citations42