Inventor

INMAN CHRIS L

US2 patents

Patents

2 patents

US5094712AMar 10, 1992

One chamber in-situ etch process for oxide and conductive material

MICRON TECHNOLOGY INC107 citations93

US6727158B2Apr 27, 2004

Structure and method for forming a faceted opening and a layer filling therein

MICRON TECHNOLOGY INC15 citations76