P

Inventor

YOSHIKAWA RYOICHI

JP43 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIKAWA RYOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

16 patents
US9343268B2May 17, 2016

Multi charged particle beam writing apparatus and multi charged particle beam writing method

NUFLARE TECHNOLOGY INC3 citations73
US9287090B2Mar 15, 2016

Multi charged particle beam writing apparatus, and multi charged particle beam writing method

NUFLARE TECHNOLOGY INC6 citations73
US9202673B2Dec 1, 2015

Multi charged particle beam writing method and multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC4 citations73
US8729507B2May 20, 2014

Multi charged particle beam writing method and multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC5 citations73
USRE47561EAug 6, 2019

Multi charged particle beam writing method and multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC1 citations63
US9076564B2Jul 7, 2015

Multi charged particle beam writing apparatus and multi charged particle beam writing method

NUFLARE TECHNOLOGY INC2 citations63
US8907306B2Dec 9, 2014

Multi charged particle beam writing apparatus and multi charged particle beam writing method

NUFLARE TECHNOLOGY INC3 citations63
US8741547B2Jun 3, 2014

Multi charged particle beam writing apparatus and multi charged particle beam writing method

NUFLARE TECHNOLOGY INC2 citations63
US10020159B2Jul 10, 2018

Multi charged particle beam writing method and multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC0 citations52
US9934935B2Apr 3, 2018

Multi charged particle beam writing apparatus and multi charged particle beam writing method

NUFLARE TECHNOLOGY INC1 citations52
US9691585B2Jun 27, 2017

Multi charged particle beam writing method, and multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC1 citations52
US9570267B2Feb 14, 2017

Multi charged particle beam writing method and multi charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC0 citations52
US10796882B2Oct 6, 2020

Charged particle beam writing apparatus and charged particle beam writing method

NUFLARE TECHNOLOGY INC0 citations42
US10784080B2Sep 22, 2020

Multiple charged particle beam writing apparatus, and multiple charged particle beam writing method

NUFLARE TECHNOLOGY INC0 citations42
US9805905B2Oct 31, 2017

Blanking device for multi-beam of charged particle writing apparatus using multi-beam of charged particle and defective beam blocking method for multi-beam of charged particle

NUFLARE TECHNOLOGY INC0 citations42
US9530610B2Dec 27, 2016

Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams

NUFLARE TECHNOLOGY INC0 citations36

CANON KK

15 patents

TOSHIBA KK

4 patents

TOKYO SHIBAURA ELECTRIC CO

4 patents

YOSHIKAWA RYOICHI

2 patents

SONY CORP

1 patent

SONY SEMICONDUCTOR SOLUTIONS CORP

1 patent