Inventor
KIMURA HAYATO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KIMURA HAYATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
10 patentsUS7589335B2Sep 15, 2009
Charged-particle beam pattern writing method and apparatus and software program for use therein
NUFLARE TECHNOLOGY INC12 citations80
US10483087B2Nov 19, 2019
Multi charged particle beam writing apparatus and multi charged particle beam writing method
NUFLARE TECHNOLOGY INC1 citations60
US7476881B2Jan 13, 2009
Charged beam drawing apparatus and charged beam drawing method
NUFLARE TECHNOLOGY INC3 citations59
US7598504B2Oct 6, 2009
Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus
NUFLARE TECHNOLOGY INC4 citations57
US9934935B2Apr 3, 2018
Multi charged particle beam writing apparatus and multi charged particle beam writing method
NUFLARE TECHNOLOGY INC1 citations52
US10475621B2Nov 12, 2019
Drawing device and drawing method
NUFLARE TECHNOLOGY INC0 citations49
US9953800B2Apr 24, 2018
Multi-charged particle beam writing apparatus and multi-charged particle beam writing method
NUFLARE TECHNOLOGY INC1 citations49
US10886103B2Jan 5, 2021
Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations48
US7900185B2Mar 1, 2011
Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatus
NUFLARE TECHNOLOGY INC1 citations47
US10109454B2Oct 23, 2018
Diagnosis method, charged particle beam lithography apparatus, and recording medium
NUFLARE TECHNOLOGY INC0 citations40