Inventor
YASHIMA JUN
JP30 patents
⚠️ This page may combine multiple inventors who share the name “YASHIMA JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
14 patentsUS7740991B2Jun 22, 2010
Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam
NUFLARE TECHNOLOGY INC19 citations92
US7601968B2Oct 13, 2009
Charged particle beam writing method and apparatus
NUFLARE TECHNOLOGY INC19 citations92
US8552405B2Oct 8, 2013
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC8 citations84
US8352889B2Jan 8, 2013
Beam dose computing method and writing method and record carrier body and writing apparatus
NUFLARE TECHNOLOGY INC5 citations83
US9548183B2Jan 17, 2017
Charged particle beam writing apparatus, and charged particle beam writing method
NUFLARE TECHNOLOGY INC4 citations73
US9153420B2Oct 6, 2015
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC3 citations62
US9141750B2Sep 22, 2015
Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writing
NUFLARE TECHNOLOGY INC2 citations62
US10937629B2Mar 2, 2021
Multi charged particle beam writing apparatus and multi charged particle beam writing method
NUFLARE TECHNOLOGY INC1 citations61
USRE47707ENov 5, 2019
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations52
US9934935B2Apr 3, 2018
Multi charged particle beam writing apparatus and multi charged particle beam writing method
NUFLARE TECHNOLOGY INC1 citations52
US9659747B2May 23, 2017
Method of generating write data for energy beam writing apparatus, method of writing with energy beam, and energy beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations52
US8872141B2Oct 28, 2014
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC1 citations52
US9564293B2Feb 7, 2017
Charged particle beam writing apparatus, and buffer memory data storage method
NUFLARE TECHNOLOGY INC0 citations42
US9875876B2Jan 23, 2018
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations41
YASHIMA JUN
12 patentsUS8122390B2Feb 21, 2012
Charged particle beam writing apparatus, and apparatus and method for correcting dimension error of pattern
YASHIMA JUN10 citations84
US8065635B2Nov 22, 2011
Method for resizing pattern to be written by lithography technique, and charged particle beam writing method
YASHIMA JUN10 citations84
US8669537B2Mar 11, 2014
Charged particle beam writing apparatus and method
YASHIMA JUN4 citations72
US8563952B2Oct 22, 2013
Charged particle beam writing apparatus
YASHIMA JUN5 citations72
US8878149B2Nov 4, 2014
Charged particle beam writing apparatus and charged particle beam writing method
YASHIMA JUN2 citations62
US8429575B2Apr 23, 2013
Method for resizing pattern to be written by lithography technique, and charged particle beam writing method
YASHIMA JUN3 citations62
US8183545B2May 22, 2012
Charged particle beam writing apparatus, charged particle beam writing method and apparatus of processing data for charged particle beam writing
YASHIMA JUN5 citations62
US8527913B2Sep 3, 2013
Method for resizing pattern to be written by lithography technique, and charged particle beam writing method
YASHIMA JUN1 citations52
US8466440B2Jun 18, 2013
Charged particle beam drawing apparatus and control method thereof
YASHIMA JUN2 citations51
US9188853B2Nov 17, 2015
Charged particle beam drawing apparatus and control method thereof
YASHIMA JUN0 citations41
US9006691B2Apr 14, 2015
Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing block
YASHIMA JUN0 citations41
US8796650B2Aug 5, 2014
Charged particle beam drawing method and apparatus
YASHIMA JUN0 citations41