Inventor

HENKE AXEL

DE2 patents

⚠️ This page may combine multiple inventors who share the name “HENKE AXEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US6897155B2May 24, 2005

Method for etching high-aspect-ratio features

APPLIED MATERIALS INC11 citations71

GLOBALFOUNDRIES INC

1 patent

US10084057B2Sep 25, 2018

NVM device in SOI technology and method of fabricating an according device

GLOBALFOUNDRIES INC0 citations49