Inventor
KOKAWA YOSHIKO
JP5 patents
Patents
5 patentsUS5381032AJan 10, 1995
Semiconductor device having a gate electrode of polycrystal layer and a method of manufacturing thereof
MITSUBISHI ELECTRIC CORP26 citations90
US5177569AJan 5, 1993
Semiconductor device having a two layered structure gate electrode
MITSUBISHI ELECTRIC CORP40 citations90
US5721145AFeb 24, 1998
Method of making a semiconductor substrate having gettering effect
MITSUBISHI ELECTRIC CORP17 citations83
US5419786AMay 30, 1995
Semiconductor substrate for bipolar element
MITSUBISHI ELECTRIC CORP17 citations72
US5221630AJun 22, 1993
Method of manufacturing semiconductor device having a two layered structure gate electrode
MITSUBISHI ELECTRIC CORP11 citations71