Inventor
SHINOHARA TOYOJI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SHINOHARA TOYOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
10 patentsUS6949225B1Sep 27, 2005
Method and apparatus for treating a waste gas containing fluorine-containing compounds
EBARA CORP14 citations83
US9822974B2Nov 21, 2017
Vacuum pump with abatement function
EBARA CORP4 citations72
US10215407B2Feb 26, 2019
Exhaust gas treatment apparatus
EBARA CORP3 citations71
US9364786B2Jun 14, 2016
Exhaust gas abatement apparatus
EBARA CORP2 citations62
US10632419B2Apr 28, 2020
Vacuum pump with abatement function
EBARA CORP0 citations51
US9956524B2May 1, 2018
Vacuum pump with abatement function
EBARA CORP1 citations51
US7972582B2Jul 5, 2011
Method and apparatus for treating exhaust gas
EBARA CORP1 citations51
US10143964B2Dec 4, 2018
Vacuum pump with abatement function
EBARA CORP0 citations41
US10227926B2Mar 12, 2019
Exhaust gas abatement system
EBARA CORP0 citations38
US10352633B2Jul 16, 2019
Flow passage connecting apparatus for heat exchanger
EBARA CORP0 citations36