Inventor
YONEOKA YUJI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “YONEOKA YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS4963239AOct 16, 1990
Sputtering process and an apparatus for carrying out the same
HITACHI LTD168 citations97
US6171641B1Jan 9, 2001
Vacuum processing apparatus, and a film deposition apparatus and a film deposition method both using the vacuum processing apparatus
HITACHI LTD71 citations95
US5815396ASep 29, 1998
Vacuum processing device and film forming device and method using same
HITACHI LTD51 citations94
US5707500AJan 13, 1998
Vacuum processing equipment, film coating equipment and deposition method
HITACHI LTD45 citations91