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Inventor
CRAMER KONRAD
DE
2 patents
Patents
2 patents
US6865081B2
Mar 8, 2005
Microstructure cooler and use thereof
ATOTECH DEUTSCHLAND GMBH
71 citations
92
US6736983B1
May 18, 2004
Method for producing microcomponents
ATOTECH DEUTSCHLAND GMBH
12 citations
71