Inventor

LUO WEIYI

US4 patents

⚠️ This page may combine multiple inventors who share the name “LUO WEIYI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US7789993B2Sep 7, 2010

Internal balanced coil for inductively coupled high density plasma processing chamber

APPLIED MATERIALS INC8 citations84

US7572647B2Aug 11, 2009

Internal balanced coil for inductively coupled high density plasma processing chamber

APPLIED MATERIALS INC10 citations84

LAM RES CORP

2 patents

US11694911B2Jul 4, 2023

Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead

LAM RES CORP7 citations83

US12211709B2Jan 28, 2025

Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead

LAM RES CORP1 citations72