Inventor · disambiguated record

Lawrence S. Green

Also filed as: GREEN LAWRENCE S

2 granted patents·182 citations·filing 1981–1982

69Inventor score

Technology areasG03F G06T

Files withTRE SEMICONDUCTOR EQUIPMENT CO2

Top patents by PatentIndex Score

2 records

0191US4475122AAutomatic wafer alignment techniqueTRE SEMICONDUCTOR EQUIPMENT CO·Filed 1981·Granted Oct 2, 1984·159 cites·11 claims
0244US4550374AHigh speed alignment method for wafer stepperTRE SEMICONDUCTOR EQUIPMENT CO·Filed 1982·Granted Oct 29, 1985·23 cites·8 claims

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