Inventor

STONE DALE K

US23 patents

⚠️ This page may combine multiple inventors who share the name “STONE DALE K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STONE DALE K

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Diffusion resistant electrostatic clamp

Method and apparatus for non line-of-sight doping

Diffusion resistant electrostatic clamp

Apparatus for improving temperature uniformity of a workpiece

Method and apparatus for non line-of-sight doping

Platen for reducing particle contamination on a substrate and a method thereof

Thermal shield for electrostatic chuck

Platen for reducing particle contamination on a substrate and a method thereof

AXCELIS TECH INC

Apparatus for the backside gas cooling of a wafer in a batch ion implantation system

High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer

Removing byproducts of physical and chemical reactions in an ion implanter

Bellows liner for an ion beam implanter

EATON CORP

Wafer sensing and clamping monitor

Method for capturing and removing contaminant particles from an interior region of an ion implanter

Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter

STONE DALE K

Removal of charge between a substrate and an electrostatic clamp

Method of cooling textured workpieces with an electrostatic chuck

SUURONEN DAVID

High conductivity electrostatic chuck

COOKE RICHARD A

High surface resistivity electrostatic chuck

APPLIED MATERIALS INC

Enhanced substrate temperature measurement apparatus, system and method

VARIAN SEMICONDUCTOR EQUIPMENT

Electrostatic chuck with separated electrodes

BLAKE JULIAN

Triboelectric charge controlled electrostatic clamp

SUURONEN DAVID E

Platen ground pin for connecting substrate to ground