Inventor
LIN I-KUAN
US12 patents
⚠️ This page may combine multiple inventors who share the name “LIN I-KUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
9 patentsUS8861170B2Oct 14, 2014
Electrostatic chuck with photo-patternable soft protrusion contact surface
ENTEGRIS INC10 citations82
US9721821B2Aug 1, 2017
Electrostatic chuck with photo-patternable soft protrusion contact surface
ENTEGRIS INC2 citations71
US12084778B2Sep 10, 2024
Coatings for enhancement of properties and performance of substrate articles and apparatus
ENTEGRIS INC0 citations61
US12018382B2Jun 25, 2024
Coatings for enhancement of properties and performance of substrate articles and apparatus
ENTEGRIS INC0 citations61
US11713504B2Aug 1, 2023
Chemical resistant multi-layer coatings applied by atomic layer deposition
ENTEGRIS INC0 citations59
US11390943B2Jul 19, 2022
Chemical resistant multi-layer coatings applied by atomic layer deposition
ENTEGRIS INC0 citations59
US10961617B2Mar 30, 2021
Articles coated with fluoro-annealed films
ENTEGRIS INC1 citations57
US10770330B2Sep 8, 2020
Wafer contact surface protrusion profile with improved particle performance
ENTEGRIS INC0 citations33
US10734270B2Aug 4, 2020
Vacuum chuck with polymeric embossments
ENTEGRIS INC0 citations33