Inventor

BLAKE JULIAN G

US48 patents

⚠️ This page may combine multiple inventors who share the name “BLAKE JULIAN G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BLAKE JULIAN G

EATON CORP

Method and apparatus for in situ removal of contaminants from ion beam neutralization and implantation apparatuses

In situ removal of contaminants from the interior surfaces of an ion beam implanter

Plasma chamber for controlling ion dosage in ion implantation

Wafer sensing and clamping monitor

Sputtering system

Ion implantation system for implanting workpieces

Large area uniform ion beam formation

Control mechanisms for dosimetry control in ion implantation systems

Method for capturing and removing contaminant particles from an interior region of an ion implanter

Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter

Ion beam shield for implantation systems

Ion implantation system for implanting workpieces

System and method for cooling workpieces processed by an ion implantation system

APPLIED MATERIALS INC

Low emission implantation mask and substrate assembly

System apparatus and method for enhancing electrical clamping of substrates using photo-illumination

System apparatus and method for enhancing electrical clamping of substrates using photo-illumination

Carbon nanotube electrostatic chuck

Active cooling of quartz enveloped heaters in vacuum

Low emission cladding and ion implanter

System apparatus and method for enhancing electrical clamping of substrates using photo-illumination

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Control of workpiece temperature via backside gas flow

System and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing station

Diffusion resistant electrostatic clamp

Method for implantation of semiconductor wafers having high bulk resistivity

Electrostatic chuck with LED heating

Diffusion resistant electrostatic clamp

IBIS TECHNOLOGY CORP

Active wafer cooling during damage engineering implant to enhance buried oxide formation in SIMOX wafers

Coated wafer holding pin

Thermosetting resin wafer-holding pin

Wafer holding pin

VARIAN SEMICONDUCTOR EQUIPMENT

Technique for manufacturing a solar cell

Platen clamping surface monitoring

Electrostatic chuck with separated electrodes

SINCLAIR FRANK

Technique for manufacturing bit patterned media

Technique for manufacturing bit patterned media

STONE DALE K

Removal of charge between a substrate and an electrostatic clamp

Method of cooling textured workpieces with an electrostatic chuck

(unassigned)

Wafer release method and apparatus

ENGLAND JONATHAN G

Technique for low-temperature ion implantation

IBIS TECHNOLOGY COPORATION

Power sag detection and control in ion implanting system

LOW RUSSELL J

Mask applied to a workpiece

RAMAPPA DEEPAK

Pressurized treatment of substrates to enhance cleaving process

BLAKE JULIAN G

Cooled cleaving implant

RAMAPPA DEEPAK A

Pressurized treatment of substrates to enhance cleaving process

KELLERMAN PETER L

Melt purification and delivery system

ROWLAND CHRISTOPHER A

Floating sheet measurement apparatus and method

DICKERSON GARY E

Modulating implantation for improved workpiece splitting

MILLER TIMOTHY J

System and method for gas leak control in a substrate holder