Inventor
MICHALOSKI PAUL F
US7 patents
⚠️ This page may combine multiple inventors who share the name “MICHALOSKI PAUL F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GEN SIGNAL CORP
4 patentsUS5383000AJan 17, 1995
Partial coherence varier for microlithographic system
GEN SIGNAL CORP89 citations95
US5757470AMay 26, 1998
Variable annular illuminator for photolithographic projection imager
GEN SIGNAL CORP45 citations94
US5452054ASep 19, 1995
Variable annular illuminator for photolithographic projection imager
GEN SIGNAL CORP95 citations94
US5461456AOct 24, 1995
Spatial uniformity varier for microlithographic illuminator
GEN SIGNAL CORP24 citations91