Inventor

INADA KEIJI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “INADA KEIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

1 patent

US5563706AOct 8, 1996

Interferometric surface profiler with an alignment optical member

NIKON CORP65 citations94

NIPPON KOGAKU KK

1 patent

US9885558B2Feb 6, 2018

Interferometric apparatus for detecting 3D position of a diffracting object

NIPPON KOGAKU KK2 citations70

ISHII MIKIHIKO

1 patent

US8416423B2Apr 9, 2013

Interferometric apparatus for detecting 3D position of a diffracting object

ISHII MIKIHIKO3 citations54