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Inventor
NAKAO SETSUO
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “NAKAO SETSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGENCY IND SCIENCE TECHN
1 patent
US5618345A
Apr 8, 1997
Method of producing self-supporting thin film of silicon single crystal
AGENCY IND SCIENCE TECHN
6 citations
57
OOHIRA KOUYA
1 patent
US9217195B2
Dec 22, 2015
Amorphous carbon film and method for forming same
OOHIRA KOUYA
0 citations
45