Inventor
SIU STANLEY
US3 patents
Patents
3 patentsUS6357308B1Mar 19, 2002
Plasma probe and method for making same
LAM RES CORP14 citations81
US6553853B2Apr 29, 2003
Plasma probe and method for making same
LAM RES CORP5 citations70
US6618638B1Sep 9, 2003
Method for scaling processes between different etching chambers and wafer sizes
LAM RES CORP5 citations60