Inventor
LEE MYUNG-KEUN
KR2 patents
Patents
2 patentsUS10818547B2Oct 27, 2020
Method of manufacturing semiconductor device having a structure pattern having a plurality of trenches
SAMSUNG ELECTRONICS CO LTD2 citations69
US11495495B2Nov 8, 2022
Method of manufacturing semiconductor device having a structure pattern having a plurality of trenches
SAMSUNG ELECTRONICS CO LTD0 citations58