Inventor
YIN EDWARD M
US4 patents
⚠️ This page may combine multiple inventors who share the name “YIN EDWARD M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MULTIBEAM SYSTEMS INC
3 patentsUS6844550B1Jan 18, 2005
Multi-beam multi-column electron beam inspection system
MULTIBEAM SYSTEMS INC142 citations97
US6617587B2Sep 9, 2003
Electron optics for multi-beam electron beam lithography tool
MULTIBEAM SYSTEMS INC104 citations95
US6977375B2Dec 20, 2005
Multi-beam multi-column electron beam inspection system
MULTIBEAM SYSTEMS INC47 citations94