Inventor

TSAI FRANK CHING-FENG

US3 patents

⚠️ This page may combine multiple inventors who share the name “TSAI FRANK CHING-FENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MULTIBEAM SYSTEMS INC

2 patents

US6844550B1Jan 18, 2005

Multi-beam multi-column electron beam inspection system

MULTIBEAM SYSTEMS INC142 citations97

US6977375B2Dec 20, 2005

Multi-beam multi-column electron beam inspection system

MULTIBEAM SYSTEMS INC47 citations94

MULTIBEAM

1 patent

US6777675B2Aug 17, 2004

Detector optics for electron beam inspection system

MULTIBEAM55 citations91