Inventor

MOLONEY GERARD STEPHEN

US2 patents

Patents

2 patents

US6916226B2Jul 12, 2005

Chemical mechanical polishing apparatus having a stepped retaining ring and method for use thereof

EBARA TECH INC13 citations79

US7004822B2Feb 28, 2006

Chemical mechanical polishing and pad dressing method

EBARA TECH INC9 citations68