Inventor
DO KIM
US2 patents
Patents
2 patentsUS8101015B2Jan 24, 2012
Coatings and hard mask compositions for integrated circuit applications methods of production and uses thereof
KENNEDY JOSEPH5 citations56
US8642246B2Feb 4, 2014
Compositions, coatings and films for tri-layer patterning applications and methods of preparation thereof
KENNEDY JOSEPH1 citations49