Inventor

OHSAWA Tetsuji

JP2 patents

⚠️ This page may combine multiple inventors who share the name “OHSAWA Tetsuji”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

1 patent

US12147374B2Nov 19, 2024

Distributed control system and semiconductor inspection apparatus including same

HITACHI HIGH TECH CORP0 citations44

OHSAWA Tetsuji

1 patent

US9077264B2Jul 7, 2015

Charged particle beam apparatus and electrostatic chuck apparatus

OHSAWA Tetsuji0 citations36