Inventor

HUANG CHUN-HAI

TW2 patents

Patents

2 patents

US10792783B2Oct 6, 2020

System, control method and apparatus for chemical mechanical polishing

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations66

US10050159B2Aug 14, 2018

Lens structure

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48