Inventor
PARK SANG-OH
KR17 patents
⚠️ This page may combine multiple inventors who share the name “PARK SANG-OH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
14 patentsUS6959823B2Nov 1, 2005
Wafer guides for processing semiconductor substrates
SAMSUNG ELECTRONICS CO LTD15 citations83
US7386944B2Jun 17, 2008
Method and apparatus for drying a wafer, and an apparatus for cleaning and drying a wafer
SAMSUNG ELECTRONICS CO LTD9 citations82
US9087729B2Jul 21, 2015
Semiconductor devices including unitary supports
SAMSUNG ELECTRONICS CO LTD12 citations81
US6655042B2Dec 2, 2003
System and method for drying semiconductor substrate
SAMSUNG ELECTRONICS CO LTD12 citations72
US7255115B2Aug 14, 2007
Apparatus for cleaning semiconductor wafers
SAMSUNG ELECTRONICS CO LTD9 citations68
US10317798B2Jun 11, 2019
Method of forming pattern of semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations62
US7100306B2Sep 5, 2006
Wafer guides for processing semiconductor substrates
SAMSUNG ELECTRONICS CO LTD4 citations62
US6905570B2Jun 14, 2005
Apparatus for manufacturing integrated circuit device
SAMSUNG ELECTRONICS CO LTD5 citations62
US6713440B2Mar 30, 2004
Resist and etching by-product removing composition and resist removing method using the same
SAMSUNG ELECTRONICS CO LTD3 citations61
US11764180B2Sep 19, 2023
Semiconductor device including base pillar, connection pad, and insulation layer disposed on a substrate
SAMSUNG ELECTRONICS CO LTD0 citations59
US11075183B2Jul 27, 2021
Semiconductor chip and semiconductor package including the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US7348190B2Mar 25, 2008
Method of detecting a defect in a semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations57
US7520068B2Apr 21, 2009
Apparatus and method for drying semiconductor substrates
SAMSUNG ELECTRONICS CO LTD1 citations51
US7223721B2May 29, 2007
Resist and etching by-product removing composition and resist removing method using the same
SAMSUNG ELECTRONICS CO LTD1 citations51