Inventor

VESTERINEN HANNU

FI4 patents

Patents

4 patents

US11796560B2Oct 24, 2023

MEMS accelerometer with mechanically decoupled proof mass

MURATA MANUFACTURING CO2 citations59

US11377346B2Jul 5, 2022

Low-noise multi axis MEMS accelerometer

MURATA MANUFACTURING CO0 citations49

US11131688B2Sep 28, 2021

Robust z-axis acceleration sensor

MURATA MANUFACTURING CO0 citations48

US9969606B2May 15, 2018

Microelectromechanical structure and device

MURATA MANUFACTURING CO0 citations38