Inventor

DOSTALIK JR WILLIAM W

US2 patents

Patents

2 patents

US7425512B2Sep 16, 2008

Method for etching a substrate and a device formed using the method

TEXAS INSTRUMENTS INC9 citations81

US7192880B2Mar 20, 2007

Method for line etch roughness (LER) reduction for low-k interconnect damascene trench etching

TEXAS INSTRUMENTS INC13 citations76