Inventor

NIU XINHUAN

CN2 patents

Patents

2 patents

US7883557B2Feb 8, 2011

Slurry for chemical-mechanical planarization of sapphire and method for manufacturing the same

LIU YULING13 citations77

US7578890B2Aug 25, 2009

Method for removing contaminants from silicon wafer surface

LIU YULING1 citations48