Inventor

GOODWIN DANIEL L

US2 patents

Patents

2 patents

US9673076B2Jun 6, 2017

System and method for rotational transfer of articles between vacuum and non-vacuum environments

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations59

US9558975B2Jan 31, 2017

System and method for transferring articles between vacuum and non-vacuum environments

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations26