Inventor
KIYANI OMAR S
US2 patents
Patents
2 patentsUS9673076B2Jun 6, 2017
System and method for rotational transfer of articles between vacuum and non-vacuum environments
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations59
US9558975B2Jan 31, 2017
System and method for transferring articles between vacuum and non-vacuum environments
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations26