Inventor
MEHROTRA AKHIL
US8 patents
Patents
8 patentsUS10636675B2Apr 28, 2020
Methods of etching metal-containing layers
APPLIED MATERIALS INC4 citations82
US10497578B2Dec 3, 2019
Methods for high temperature etching a material layer using protection coating
APPLIED MATERIALS INC2 citations72
US10957558B2Mar 23, 2021
Methods of etching metal-containing layers
APPLIED MATERIALS INC3 citations71
US11417537B2Aug 16, 2022
Methods of etching metal-containing layers
APPLIED MATERIALS INC2 citations70
US11127599B2Sep 21, 2021
Methods for etching a hardmask layer
APPLIED MATERIALS INC0 citations60
US11942332B2Mar 26, 2024
Methods of etching metal-containing layers
APPLIED MATERIALS INC0 citations59
US10867795B2Dec 15, 2020
Method of etching hardmasks containing high hardness materials
APPLIED MATERIALS INC0 citations50
US11817312B2Nov 14, 2023
Delayed pulsing for plasma processing of wafers
APPLIED MATERIALS INC0 citations39