Inventor
HESABI ZOHREH
US7 patents
Patents
7 patentsUS10636675B2Apr 28, 2020
Methods of etching metal-containing layers
APPLIED MATERIALS INC4 citations82
US10957558B2Mar 23, 2021
Methods of etching metal-containing layers
APPLIED MATERIALS INC3 citations71
US11417537B2Aug 16, 2022
Methods of etching metal-containing layers
APPLIED MATERIALS INC2 citations70
US11127599B2Sep 21, 2021
Methods for etching a hardmask layer
APPLIED MATERIALS INC0 citations60
US11942332B2Mar 26, 2024
Methods of etching metal-containing layers
APPLIED MATERIALS INC0 citations59
US10830756B2Nov 10, 2020
Method to create a free-standing membrane for biological applications
APPLIED MATERIALS INC0 citations51
US10867795B2Dec 15, 2020
Method of etching hardmasks containing high hardness materials
APPLIED MATERIALS INC0 citations50