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Inventor
BILLINGS SCOTT CLAYTON
US
2 patents
Patents
2 patents
US6712681B1
Mar 30, 2004
Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
IBM
26 citations
91
US6989117B2
Jan 24, 2006
Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
IBM
15 citations
80